Answer:
a) ≈ 4.99 / cm^3
b) 0.515 um
Explanation:
Given data:
energy = 150 Kev
dose of 10^15 cm^-2
A) find the depth of the peak of the implant profile and its value at that depth
expression for implant profile = written below in the attached file
value of the peak depth ≈ 4.99 / cm^3
B ) determine the depth at which the concentration of phosphorus is equal concentration of boron
= 0.515 um
attached below is the detailed solution to the problem
